Ceramic heater
AssigneeIbiden Co., Ltd.
InventorsYasuji Hiramatsu, Yasutaka Ito
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Abstract
A ceramic heater improving a uniformity of temperature distribution in a work heating face, wherein a resistance heating body formed on a face of a ceramic substrate opposite to the work heating face thereof is such that the scattering of thickness is within ±50% of an average thickness, and a surface roughness of the resistance heating body is a range of 0.05-100 μm as Rmax and not more than 50% of the average thickness.
Claims5
A ceramic heater comprising a ceramic substrate and a resistance heating body formed on a surface thereof, wherein the resistance heating body is formed on a face of the ceramic substrate opposite to a heating face thereof and a scattering of a thickness of the resistance heating body is within ±15% of an average thickness, and a surface roughness of the resistance heating body is within a range of 0.05 μm-100 μm as Rmax and not more than 10% of an average thickness of the resistance heating body.
Dependencies are inferred from the claim text.