Tapered post, showerhead design to improve mixing on dual plenum showerheads

A showerhead apparatus for mixing a plurality of gases for deposition of a film using said mixed gases comprising:

• a chemical vapor deposition chamber showerhead emitting and mixing a TDEAT gas and a NH3 gas;
• a faceplate of said showerhead;
• a tapered post of said showerhead having a tapered tip that tapers inward as said post extends into said faceplate, said tapered post having a central opening emitting said TDEAT gas from said tapered tip of said post;
• and
• a tapered annular opening of said showerhead tapering inward toward said tapered post and positioned in direct contact with and circumferentially about said tapered post emitting said NH, gas, said tapered annular opening traversing through said faceplate to directly and entirely surround said tapered post such that said NH3 gas is emitted at a tapered end of said annular opening,
• wherein said TDEAT and NH3 gases are emitted coaxially to each other so that said TDEAT and NH3 gases immediately intermix upon release from said tapered post and said tapered annular opening and said NH3 gas simultaneously forces any high TDEAT concentrations and TDEAT/NH3 gaseous mixtures away from said tapered tip of said post and a surface of said faceplate.

A showerhead apparatus for mixing a plurality of gases for deposition of a film using said mixed gases comprising:

• a showerhead within a chemical vapor deposition chamber, said showerhead emitting and mixing a first gas and a second gas;
• a faceplate of said showerhead;
• a plurality of tapered posts of said showerhead extending into said faceplate, wherein each of said tapered posts taper inward to a tapered tip of each said posts, each of said tapered posts having a central opening emitting said first gas from said tapered tips of said posts;
• and
• each of said plurality of tapered posts having a single tapered annular opening of said showerhead tapering inward toward said tapered posts and positioned in direct contact with and circumferentially about each of said tapered posts emitting said second gas, each of said tapered annular opening traversing through said faceplate to directly and entirely surround each of said tapered posts such that said second gas is emitted at a tapered end of each of said tapered annular opening.