Holder for use in semiconductor device manufacturing and bio-medical sample processing
AssigneeTousimis Research Corporation
InventorsAnastasios J. Tousimis, Chris Tousimis, Yianni Tousimis
Life of this patent
Estimating the term…
Abstract
Multipurpose holders for electronic components utilized during a fabrication process must allow the components to be submerged into baths of hydrofluoric acid, rinsed in de-ionized water (D.I.), placed into baths of alcohol for dehydration, and ultimately dried prior to further processing. The holders provide both fluid flow around the wafers while in each bath of fluid and while being processed by the critical point dryer, and a containment system to keep the wafer submerged in fluid at all times during the transfer between baths and the drying equipment.
Claims4
A holder for drying specimens, comprising:
- an inner base section that is generally cup-shaped and an outer section that annularly corresponds to said inner section, and is removable from said inner section;
- wherein
- said inner base section comprises an annular retention wall to hold fluid within a volume of said inner base section, at least one flow hole disposed in said annular retention wall to allow the fluid to flow into and out of the volume of said inner base section, and standoff sections that position said outer section in relation to said inner base section;
- and
- said outer section is comprised of an annular wall having a slightly larger diameter than said annular retention wall of said inner base section,
- wherein said holder has a first position that allows fluid flow, and a second position to provide fluid containment, said first position being when said outer section and said inner section are not in contact and said at least one flow hole is uncovered by said annular wall, and said second position being when said outer section and said inner section are in contact with each other, said standoffs retain said outer section in contact with said inner base section and said annular wall closes off said at least one flow hole.
A holder for drying specimens, comprising:
- an inner base section and an outer section that annularly corresponds to said inner base section, and is removable from said inner base section;
- wherein
- said inner base section comprises an annular retention wall extending therefrom, and at least one flow hole disposed in said annular retention wall;
- and
- said outer section comprises an annular wall having a slightly larger diameter than said annular retention wall of said inner base section, wherein said holder has a first position that allows fluid flow, and a second position to provide fluid containment, said first position being when said outer section and said inner section are not in contact and said at least one flow hole is uncovered by said annular wall, and said second position being when said outer section and said inner section are in contact with each other and said annular wall closes off said at least one flow hole.
Dependencies are inferred from the claim text.