Short edge smoothing for enhanced scatter bar placement
OwnerGeorge P. Lippincottinventor
Life of this patent
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Abstract
An edge-smoothing process identifies a target edge fragment among a number of edge fragments that form a feature in a photolithographic design. Each of the edge fragments has a length and a classification. The length of the target edge fragment is less than a minimum scatter bar length. The target edge fragment is also classified so that it will receive a scatter bar, and the target edge fragment has a collinear edge fragment. The target edge fragment is smoothed in conjunction with the collinear edge fragment to increase the length of the target edge fragment.
Claims55
A method comprising:
- identifying a target edge fragment among a plurality of edge fragments comprising a feature in a photolithographic design, each of the plurality of edge fragments having a length and a classification, and said target edge fragment having a length less than a minimum scatter bar length, a classification to receive a scatter bar, and a collinear edge fragment;
- and
- smoothing the target edge fragment in conjunction with the collinear edge fragment to increase the length of the target edge fragment.
A method comprising:
- identifying a set of collinear edge fragments among a plurality of edge fragments comprising a feature in a photolithographic design, at least one of said set of collinear edge fragments being a target edge fragment, each target edge fragment having a classification to receive a scatter bar and having a length less than a minimum scatter bar length;
- and
- smoothing the set of collinear edge fragments to increase the length of each target edge fragment.
A machine readable medium having stored thereon machine executable instructions that when executed implement a method comprising:
- identifying a target edge fragment among a plurality of edge fragments comprising a feature in a photolithographic design, each of the plurality of edge fragments having a length and a classification, and said target edge fragment having a length less than a minimum scatter bar length, a classification to receive a scatter bar, and a collinear edge fragment;
- and
- smoothing the target edge fragment in conjunction with the collinear edge fragment to increase the length of the target edge fragment.
A machine readable medium having stored thereon machine executable instructions that when executed implement a method comprising:
- identifying a set of collinear edge fragments among a plurality of edge fragments comprising a feature in a photolithographic design, at least one of said set of collinear edge fragments being a target edge fragment, each target edge fragment having a classification to receive a scatter bar and having a length less than a minimum scatter bar length;
- and
- smoothing the set of collinear edge fragments to increase the length of each target edge fragment.
An apparatus comprising:
- means for identifying a target edge fragment among a plurality of edge fragments comprising a feature in a photolithographic design, each of the plurality of edge fragments having a length and a classification, and said target edge fragment having a length less than a minimum scatter bar length, a classification to receive a scatter bar, and a collinear edge fragment;
- and
- means for smoothing the target edge fragment in conjunction with the collinear edge fragment to increase the length of the target edge fragment.
An apparatus comprising:
- means for identifying a set of collinear edge fragments among a plurality of edge fragments comprising a feature in a photolithographic design, at least one of said set of collinear edge fragments being a target edge fragment, each target edge fragment having a classification to receive a scatter bar and having a length less than a minimum scatter bar length;
- and
- means for smoothing the set of collinear edge fragments to increase the length of each target edge fragment.
Dependencies are inferred from the claim text.