Mark detection method and unit, exposure method and apparatus, and device manufacturing method and device
AssigneeNikon Corporation
InventorKouji Yoshida
Life of this patent
Estimating the term…
Abstract
In view of a specific area having a characteristic surface state in a mark-formed area or a surrounding area thereof, an area calculation unit has a window having a dimension corresponding to the specific area scan the whole measurement area in order to obtain a quantity representing a surface state based on measured signals through the window, and then, by identifying a measured signal area corresponding to the specific area based on the quantity as a function of the window's position, extracts a measured signal area corresponding to the mark. And a position calculation unit performs computation such as pattern-matching on the signal area extracted, thereby detecting the position of the mark accurately and quickly.
Claims56
A mark detection method with which to detect a mark formed on an object, comprising:
- measuring a surface state of an area of said object including, in a predetermined direction, a mark-formed area where said mark is formed and a no-mark area formed on the outside in said predetermined direction of said mark-formed area, said no-mark area having a characteristic compared to other areas;
- and
- extracting, while running a window having a dimension substantially coincident with said no-mark area in a signal process relatively to a signal measured in said measuring and obtaining at least one quantity denoting the surface state of an area in said window moving across said no-mark area having a characteristic based on measurement results through said window in said measuring, an area having a measurement result reflecting said mark based on said at least one quantity varying with position of said window.
A mark detection method with which to detect a mark formed on an object, comprising:
- measuring a surface state of an area of said object including, in a predetermined direction, a mark-formed area inside which a mark area is formed in said predetermined direction, said mark area having a characteristic compared to other areas;
- and
- extracting, while running a window having a dimension substantially coincident with said mark area in a signal process relatively to a signal measured in said measuring and obtaining at least one quantity denoting the surface state of an area in said window moving across said mark area having a characteristic based on measurement results through said window in said measuring, an area having a measurement result reflecting said mark based on said at least one quantity varying with position of said window.
A mark detection unit which detects a mark formed on an object, comprising:
- a measuring unit which measures a surface state of an area of said object including said mark in a predetermined direction;
- and
- an extracting/computing unit which, while running a window having a dimension substantially coincident in a signal process with a specific area on said object having a characteristic different from other areas relatively to a signal measured by said measuring unit and obtaining at least one quantity denoting the surface state of an area in said window moving across said specific area having a characteristic based on measurement results through said window by said measuring unit, extracts an area having a measurement result reflecting said mark based on said at least one quantity varying with position of said window.
A mark detection method with which to detect a mark formed on an object, comprising:
- measuring a surface state of an area of said object including said mark in a predetermined direction;
- extracting, after obtaining first at least one feature-quantity denoting the surface state of each of partitioned areas of said area based on measurement results obtained in said measuring, a predetermined area having a measurement result reflecting said mark based on said first at least one feature-quantity;
- and
- obtaining a second feature-quantity that is different from said first at least one feature-quantity and that denotes a feature of the surface state of said predetermined area based on said measurement result of said predetermined area extracted in said extracting, and detecting a position of said mark in said predetermined direction based on said second feature-quantity.
A mark detection unit which detects a mark formed on an object, comprising:
- a measuring unit which measures a surface state of an area of said object including said mark in a predetermined direction;
- an extracting/computing unit which, afler obtaining first at least one feature-quantity denoting the surface state of each of partitioned areas of said area based on measurement results obtained by said measuring unit, extracts a predetermined area having a measurement result reflecting said mark based on said first at least one feature-quantity;
- and
- a position computing unit which obtains a second feature-quantity that is different from said first at least one feature-quantity and that denotes a feature of the surface state of said predetermined area based on said measurement result of said predetermined area extracted by said extracting/computing unit, and detects a position of said mark in said predetermined direction based on said second feature-quantity.
Dependencies are inferred from the claim text.