Relay image optical system, and illuminating optical device and exposure system provided with the optical system
AssigneeNikon Corporation
InventorYutaka Suenaga
Life of this patent
Estimating the term…
Abstract
This invention provides a relay imaging optical system which is composed of a small number of lenses and can be miniaturized and reduced in weight with maintaining required optical characteristics. This relay imaging optical system is provided for forming an image of a first plane (10) on a second plane (M), and comprises a first lens group G1 which is constructed so that an image plane thereof is positioned within a limited range, a second lens group G2, and a third lens group G3, from the first plane side. At least two lens groups of the first lens group through the third lens group have at least one aspheric surface respectively; and the total number of lenses which constitute this optical system are ten or fewer.
Claims35
A relay imaging optical system which forms an image of a first plane on a second plane, the relay imaging optical system comprising:
- a pupil;
- a front lens group arranged in an optical path between the first plane and a position of the pupil;
- and
- a rear lens group arranged in an optical path between the position of the pupil and the second plane, the rear lens group including two aspheric surfaces which are formed on convex lens surfaces;
- wherein
- a total number of lenses which constitute the relay imaging optical system is ten or less.
A relay imaging optical system which forms an image of a first plane on a second plane, the relay imaging optical system comprising:
- a total number of lenses which is ten or less;
- at least two aspheric surfaces;
- and
- wherein a lens arranged closest to the first plane among the ten or less lenses of the relay imaging optical system has one of the at least two aspheric surfaces.
A relay imaging optical system which forms an image of a first plane on a second plane, the relay imaging optical system comprising:
- a pupil;
- at least two aspheric surfaces;
- and
- a meniscus lens arranged in an optical path between the first plane and a position of the pupil, the meniscus lens has one of the at least two aspheric surfaces;
- wherein
- a total number of lenses which constitute the relay imaging optical system is ten or less.
Dependencies are inferred from the claim text.