Cascaded inert gas purging system
AssigneeThe BOC Group, Inc.
InventorPaul J. Celauro
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Abstract
The present invention is a system for protecting, for example, electronic, mechanical, or other components from contamination in a processing environment and includes a distribution manifold, a pressurized fluid in fluid communication with the manifold, and a plurality of apparatuses, such as sensors, which are connected to the manifold by respective conduits throughwhich the pressurized fluid flows to maintain a positive pressure at each of the apparatuses to prevent the processing environment from contacting the plurality of apparatus.
Claims14
A system for protecting a data component from contamination in a processing environment external to the system, comprising:
- sensing moans constructed and arranged for communication with a process component to be sensed in the processing environment and for transmitting a signal representing the sensed process component;
- distribution means for distributing a fluid under pressure to the sensing means;
- connecting means for connecting said distribution means with said sensing means and having a first end and a second and, said first end being connected to said distribution means for communication therewith, and said second end being connected to said sensing means for communication therewith for distribution of the pressurized fluid;
- and
- regulating means in communication with said sensing means for regulating the fluid pressure distributed from said distribution means to be greater at the sensing means than a pressure of the environment external to said system at said sensing means.
A method for protecting data components in a processing environment, comprising:
- providing a pressure differential between the data components and the processing environment;
- controlling the pressure differential for a pressure at the data components to exceed a pressure at the processing environment for preventing the data components from being exposed to the processing environment;
- and
- regulating the pressure differential between the data components and the processing environment to remain continuous at a select pressure differential.
Dependencies are inferred from the claim text.