Flash memory cell including two floating gates and an erasing gate
AssigneePowerchip Semiconductor Corp.
InventorsChih-Wei Hung, Cheng-Yuan Hsu, Da Sung, Chien-Chih Du
Life of this patent
Estimating the term…
Loading patent…
AssigneePowerchip Semiconductor Corp.
InventorsChih-Wei Hung, Cheng-Yuan Hsu, Da Sung, Chien-Chih Du
Estimating the term…
A flash memory includes a substrate, at least a source and two drains formed in the substrate, and the source located between the drains, two tunnel oxide layers formed on the substrate between each drain and the source, a floating gate formed on each of the tunnel oxide layers, a plurality of first oxide layers formed aside each of the floating gates, a dielectric layer formed on each of the floating gates, a control gate formed on each of the dielectric layers, a plurality of second oxide layers formed on surfaces of the control gates and extending toward both sides of the control gates, a lateral width of each second oxide layer being larger than a lateral width of each oxide layer, a third oxide layer formed on the source, and an erasing gate formed on the third oxide layer and located between the floating gates.
A flash memory cell comprising:
Dependencies are inferred from the claim text.