Defect detection and repair of micro-electro-mechanical systems (MEMS) devices
AssigneeActive Optical Networks, Inc.
InventorVlad J. Novotny
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Abstract
A method of defect detection and repair of micro-electro-mechanical systems (MEMS) devices comprising the steps of (A) detecting at least one defect in the MEMS device, wherein each defect is an object that prevents the MEMS device from functioning substantially properly; (B) performing repair of each detected defect; (C) checking whether the MEMS device is functioning substantially properly after each detected defect is repaired; and (D) if the MEMS device is not functioning substantially properly after each detected defect is repaired, repeating steps (A-C).
Claims13
A method of defect detection and repair of micro-electro-mechanical systems (MEMS) devices comprising the steps of:
- (A) detecting at least one defect in said MEMS device, wherein each said defect is an object that prevents said MEMS device from functioning substantially properly;
- (B) performing repair of each said detected defect;
- (C) checking whether said MEMS device is functioning substantially properly after each said detected defect is repaired;
- and
- (D) if said MEMS device is not functioning substantially properly after each said detected defect is repaired, repeating said steps (A-C).
Dependencies are inferred from the claim text.