System and method for product yield prediction using a logic characterization vehicle

A system for predicting yield of integrated circuits comprising:

• a) a characterization vehicle that includes:
• at least one combinatorial circuit element;
• and
• a control circuit that controls the combinatorial circuit element, including:
• input means for inputting a test pattern of signals into the combinatorial circuit element;
• output means for storing an output pattern that is output by the combinatorial circuit element based on the test pattern;
• a ring bus for connecting the output means to the input means so as to cause oscillation;
• and
• a counter for counting a frequency of the oscillation, thereby to measure performance of the combinatorial circuit element;
• b) a yield model which embodies a layout as defined by the characterization vehicle, said yield model having been subjected to at least one of a plurality of process operations making up a fabrication cycle to be used in fabricating a final integrated circuit product;
• c) a product layout;
• and
• d) an extraction engine for extracting predetermined layout characteristics from the product layout, which characteristics are used in connection with the yield model to produce a yield prediction.