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US 6,807,661 B2Granted
Correcting a mask pattern using a clip mask
AssigneeTexas Instruments Incorporated
InventorRobert A. Soper
Life of this patent
Estimating the term…
Abstract
Correcting a mask pattern includes partitioning the mask pattern to yield templates. The following is repeated for each template to generate correction data: a clip mask is generated for a template selected as a main template; the main template is merged with context templates to yield a merged template; the merged template is divided to yield segments including clip segments, where an intersection of the clip mask and the merged template defines an endpoint of a clip segment; a proximity correction procedure is performed on the segments to yield a corrected template; and correction data of the corrected template is selected according to the clip mask. The correction data for the templates are aggregated to correct the mask pattern.
Claims23
A method for correcting a mask pattern, comprising:
- partitioning a mask pattern to yield a plurality of templates;
- repeating the following for each template of the plurality of templates to generate correction data for the templates:
- selecting a template as a main template;
- generating a clip mask for the main template;
- merging the main template with one or more context templates to yield a merged template;
- dividing the merged template to yield a plurality of segments comprising one or more clip segments, an intersection of the clip mask and the merged template defining an endpoint of a clip segment;
- performing a proximity correction procedure on the segments to yield a corrected template;
- and
- selecting correction data of the corrected template according to the clip mask;
- and
- aggregating the correction data for the templates to correct the mask pattern.
8 more elements
A system for correcting a mask pattern, comprising:
- a database operable to store a mask pattern;
- and
- a server coupled to the database and operable to:
- partition the mask pattern to yield a plurality of templates;
- repeat the following for each template of the plurality of templates to generate correction data for the templates:
- select a template as a main template;
- generate a clip mask for the main template;
- merge the main template with one or more context templates to yield a merged template;
- divide the merged template to yield a plurality of segments comprising one or more clip segments, an intersection of the clip mask and the merged template defining an endpoint of a clip segment;
- perform a proximity correction procedure on the segments to yield a corrected template;
- and
- select correction data of the corrected template according to the clip mask;
- and
- aggregate the correction data for the templates to correct the mask pattern.
11 more elements
Logic for correcting a mask pattern, the logic embodied in a medium and operable to:
- partition a mask pattern to yield a plurality of templates repeat the following for each template of the plurality of templates to generate correction data for the templates:
- select a template as a main template;
- generate a clip mask for the main template;
- merge the main template with one or more context templates to yield a merged template;
- divide the merged template to yield a plurality of segments comprising one or more clip segments, an intersection of the clip mask and the merged template defining an endpoint of a clip segment;
- perform a proximity correction procedure on the segments to yield a corrected template;
- and
- select correction data of the corrected template according to the clip mask;
- and
- aggregate the correction data for the templates to correct the mask pattern.
7 more elements
A system for correcting a mask pattern, comprising:
- means for partitioning a mask pattern to yield a plurality of templates;
- means for repeating the following for each template of the plurality of templates to generate correction data for the templates:
- selecting a template as a main template;
- generating a clip mask for the main template;
- merging the main template with one or more context templates to yield a merged template;
- dividing the merged template to yield a plurality of segments comprising one or more clip segments, an intersection of the clip mask and the merged template defining an endpoint of a clip segment;
- performing a proximity correction procedure on the segments to yield a corrected template;
- and
- selecting correction data of the corrected template according to the clip mask;
- and
- means for aggregating the correction data for the templates to correct the mask pattern.
8 more elements
A method for correcting a mask pattern, comprising:
- partitioning a mask pattern to yield a plurality of templates;
- repeating the following for each template of the plurality of templates to generate correction data for the templates:
- selecting a template as a main template;
- generating a clip mask for the main template;
- merging the main template with one or more context templates to yield a merged template;
- dividing the merged template to yield a plurality of segments comprising one or more clip segments, an intersection of the clip mask and the merged template defining an endpoint of a clip segment;
- combining at least one clip segment with an adjacent segment to yield a longer segment by:
- determining that the at least one clip segment fails to satisfy a length threshold, and combining the at least one clip segment with the adjacent segment to yield the longer segment that satisfies the length threshold;
- and
- determining that there are a plurality of adjacent segments, combining the at least one clip segment with an adjacent segment according to a hierarchy of a plurality of rules, and combining the at least one clip segment with an adjacent segment that is associated with a member selected from a group consisting of a gate, the main template, and a critical dimension;
- performing a proximity correction procedure on the segments to yield a corrected template;
- and
- selecting correction data of the corrected ding to the clip mask;
- and
- aggregating the correction data for the templates to mask pattern.
12 more elements
Dependencies are inferred from the claim text.