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AssigneeTexas Instruments Incorporated
InventorsLea Adams, Edward C. Fisher, Josh Malone, Seth Miller, Jack C. Smith, William Kevin Dennis, Jeffrey W. Marsh
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The present invention provides, in one aspect, a method of manufacturing a MEMS assembly. In one embodiment, the method includes mounting a MEMS device, such as a MEMS mirror array, on an assembly substrate. The method further includes coupling an assembly lid to the assembly substrate and over the MEMS device to create an interior of the MEMS assembly housing the MEMS device, whereby the coupling maintains an opening to the interior of the MEMS assembly. Furthermore, the method includes lubricating/passivating the MEMS device through the opening. In addition, a MEMS assembly constructed according to a process of the present invention is also disclosed.
A method of manufacturing a MEMS assembly, comprising:
A MEMS assembly constructed according to a process comprising:
Dependencies are inferred from the claim text.