US 6,806,991 B1 · Fully released MEMs XYZ flexure stage with integrated capacitive feedback

Abstract

In one embodiment, the present invention is directed to a system that enables controllable positioning of a fully-released micro-stage. The fully-released micro-stage may be assembled onto a detector substrate that enables micro-positioning feedback. A payload structure (e.g., a lens, mirror, manipulator, and/or the like) may be assembled or coupled onto the fully-release microstage. Snap connectors may facilitate the mechanical coupling associated with assembly of the various components. The fully-released microstage may be actuated by motion amplified actuators that are coupled to anchored flexures. Moreover, the actuation of the fully-release microstage may produce fully decoupled movement by coupling the actuators and respective flexures to the stage in a mirrored fashion.

Claims25

Dependent claims

A system for controllably positioning a fully-released micro-stage, comprising:

a first plurality of actuator means for translating said fully-released micro-stage in a first direction, wherein each of said first plurality of actuator means are mechanically coupled to said fully-released micro-stage by a respective anchored flexure and are complementarily positioned to substantially balance torque applied to said fully-released micro-stage during actuation of said first plurality of actuator means;
and
a second plurality of actuator means for translating said fully-released micro-stage in a second direction, wherein each of said second plurality of actuator means are mechanically coupled to said fully-released micro-stage by a respective anchored flexure and are complementarily positioned to substantially balance torque applied to said fully-released micro-stage during actuation of said second plurality of actuator means, and wherein said first plurality of actuator means and said second plurality of actuator means are controllable with at least sub-micron precision.

Dependencies are inferred from the claim text.

Fully released MEMs XYZ flexure stage with integrated capacitive feedback

Life of this patent

Fully released MEMs XYZ flexure stage with integrated capacitive feedback

Life of this patent

Abstract

Claims25