Automatic exposing apparatus and method for exposing both sides of works
AssigneeORC Manufacturing Co., Ltd.
InventorsMasaru Ise, Masaaki Matsuda
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AssigneeORC Manufacturing Co., Ltd.
InventorsMasaru Ise, Masaaki Matsuda
Estimating the term…
An automatic both sides exposing apparatus 1 is provided, and includes a first exposing mechanism 10 having a first mask and the second exposing mechanism 20 having a second mask; a carrying-in portion 2 and a carrying-out portion 30; an optical system for exposing the substrate; and a first holder A and a second holder B for holding the substrate and delivering the substrate from the first holder A to the second holder B with reversal of sides at a spot located in an interval between the first and second exposing mechanisms where both holders meet each other. Accordingly, a frequency at which the substrate is delivered is minimized, the substrate can be turned over without the reversing mechanism, the substrate can be transferred (and delivered) at good efficiency in limited space and exposed accurately, any inconvenient origin for the substrate may be minimized, and the apparatus is made compact.
An automatic exposing apparatus for exposing a work substrate having first and second sides, the automatic exposing apparatus comprising:
An automatic exposing apparatus for exposing a work substrate having first and second sides, the automatic exposing apparatus comprising:
Dependencies are inferred from the claim text.