Mask clamping device

An apparatus for clamping a semiconductor mask, said mask being generally planar such that it has two comparatively large and opposing sides, said apparatus comprising:

• a base having an upper surface and including an adjustable brace;
• a first contact means for making compressive contact with one of said mask sides, said first contact means being affixed to said brace;
• a generally elongated spring extending along said base and angled with respect to said upper surface, said spring having first and second ends, said spring being attached to said base at said first end of said spring, said spring being actuated by deflecting said second end in a direction normal to said upper surface, said spring also having a second contact means for making compressive contact with the other of said mask sides, said second contact means being positioned between said first and second ends of said spring and such that said first and second contact means are opposed to one another;
• and
• an adjustment screw disposed in a hole in said brace at an angle to said upper surface, for adjusting a vertical displacement of said first contact means relative to the base.

An apparatus for clamping a semiconductor mask, said mask being generally planar such that it has two comparatively large and opposing side, said apparatus comprising:

• a base having an adjustable brace, said brace having a channel and a hole with a concave surface, said brace being adjustable by means of an adjustment screw;
• a first contact means for making compressive contact with one of said mask sides, said first contact means being affixed to said brace;
• a generally elongated spring having first and second ends, said spring being attached to said base at said first end of said spring, said spring also having a second contact means for making compressive contact with the other of said mask sides, said second contact means being positioned such that it is between said first and second ends of said spring and such that said first and second contact means are opposed to one another;
• a pivot pin that is matingly adapted for insertion in said channel, said brace and said pin being mounted such that adjustments to said adjustment screw will cause said brace to pivot on said pin;
• a retention screw, including a screw head having a convex surface on its underside, said screw head being configured such that when said retention screw is inserted in said hole said convex surface of said screw head will matingly engage said concave surface of said hole.