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US 6,806,164 B2Granted
Semiconductor apparatus and method for fabricating the same
AssigneeOki Electric Industry Co., Ltd.
InventorsShinzi Kawada, Hiroyuki Kawano
Life of this patent
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Abstract
First, a substrate, on which a plurality of semiconductor devices is formed, is provided. Next, a first etching treatment is carried out to the substrate with a first etching gas comprising CF4 to form a base trench having a rounded-off upper edge or tapered upper edge. A second etching treatment is carried out to the substrate to form a trench region at the base trench so that the trench region has a rounded-off upper edge. And then, an insulating layer is formed on the substrate to fill up the trench region therewith.
Claims4
A method for fabricating a semiconductor apparatus, comprising:
- providing a substrate on which a plurality of semiconductor devices are formed;
- providing a mask layer on the substrate to have an opening corresponding to a device isolating region;
- performing a first etching treatment to the substrate using the mask layer as an etching mask to form a trench region on the substrate;
- performing a first thermal oxidation treatment of a dry type to the substrate to round off an upper edge of the trench region;
- enlarging the opening of the mask layer by an isotropic etching process so that an upper edge of the trench region is fully exposed;
- forming an insulating layer in the trench region and on the substrate so that the insulating layer extends outwardly from the trench region to cover the exposed upper edge of the trench region completely;
- and
- performing a second thermal oxidation treatment of a wet type to the substrate so as to further round off the upper edge of the trench region, after said forming an insulating layer.
5 more elements
Dependencies are inferred from the claim text.