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US 6,805,751 B2Granted
Method and apparatus for removal of minute particles from a surface using thermophoresis to prevent particle redeposition
AssigneeAlkansas State University
InventorSusan Davis Allen
Life of this patent
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Abstract
A method and apparatus for removing minute particles from a surface of a sample are provided that prevent redeposition of the particles onto the surface. By combining thermophoresis with laser assisted particle removal (LAPR), the methods and apparatus remove minute particles (for example, micrometer and nanometer sizes) and assure that they will not redeposit.
Claims13
A method of removing one or more particle(s) adhered to a surface of a sample, comprising:
- arranging an energy transfer medium under and around the one or more particle(s);
- irradiating the one or more particle(s), the surface and/or the energy transfer medium with laser energy from a laser energy source;
- absorbing sufficient energy in the one or more particle(s), the surface, the substrate, and/or the energy transfer medium to dislodge the one or more particle(s);
- and
- creating a temperature gradient adjacent to the surface using a heating and/or cooling source separate from the laser energy source to prevent the one or more particle(s) from redepositing on the surface.
2 more elements
A method of removing one or more particle(s) adhered to a surface of a sample, comprising:
- irradiating the one or more particle(s)/sample combination with laser energy from a laser energy source;
- absorbing sufficient energy in the one or more particle(s)/sample combination to dislodge the one or more particle(s);
- and
- creating a temperature gradient adjacent to the surface using a heating and/or cooling source separate from the laser energy source to prevent the one or more particle(s) from redepositing on the surface.
1 more element
Dependencies are inferred from the claim text.