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US 6,804,851 B2Granted
Holder for semiconductor wafers in a brush-cleaning installation
AssigneeInfineon Technologies AG
InventorsMatthias Fehr, Rüdiger Hunger, Thomas Mieth
Life of this patent
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Abstract
A holder in a brush-cleaning installation, preferably for combined use in the brush-cleaning and centrifugal-drying process, contains a carrier part from which there extend, in a spider-shaped manner, a plurality of carrying arms. On the carrying arms there is mounted, in a rotatable manner in each case, a guide roller which, in addition to positioning the semiconductor wafer vertically, also makes it possible for the semiconductor wafer to be positioned horizontally with the aid of an annular collar on a bottom section of the guide roller.
Claims5
A holder for a wafer, comprising:
- a carrier part;
- a plurality of carrying arms extending in a spider-shaped manner from said carrier part and each having a bore formed therein;
- a plurality of bolts;
- and
- a plurality of guide rollers for positioning the wafer vertically and each mounted rotatably on one of said carrying arms, each of said guide rollers having an annular collar for positioning the wafer horizontally, each of said guide rollers with said annular collar functioning as a rotationally symmetrical sleeve having a through-bore formed therein and secured in a rotatable manner on one of said carrying arms by way of one of said bolts disposed in said through-bore, each of said guide rollers having an underside with an extension resting on one of said carrying arms, said extension having an abutment surface with a diameter being smaller than a diameter of said rotationally symmetrical sleeve to achieve a reduced surface friction;
- each of said bolts having a bottom bolt section with a self-securing thread for fastening in said bore on one of said carrying arms, a central bolt section for bearing said rotationally symmetrical sleeve with a sliding action, and a top bolt section with a hat-shape for positioning said rotationally symmetrical sleeve vertically.
3 more elements
Dependencies are inferred from the claim text.