Control device for emergency stop in semiconductor manufacturing system
AssigneeRenesas Technology Corp.
InventorAkira Ono
Life of this patent
Estimating the term…
Abstract
The semiconductor manufacturing system includes semiconductor production equipment as the passive equipment and an AMHS as the active equipment. The semiconductor production equipment control panel includes a circuit which turns off an ES signal being applied via an optical I/O to the AMHS in response to an input from an ES button, without stopping the operation of the semiconductor production equipment. The AMHS includes a circuit which brings a vehicle and a hand of the AMHS to an emergency stop when the ES signal received via the optical I/O turns off.
Claims5
A control device of a semiconductor manufacturing system including semiconductor production equipment and transport equipment transporting wafers contained in a carrier to the semiconductor production equipment, said semiconductor production equipment including a first controller for bringing said semiconductor production equipment to an emergency stop, said transport equipment including a second controller for bringing said transport equipment to an emergency stop, said first and second controllers being connected by a signal line for transmitting a signal from the first controller to the second controller, said second controller configured to bring said transport equipment to the emergency stop when said signal is in an off state,
- said control device comprising:
- receiving means for receiving an emergency stop signal for bringing said transport equipment to an emergency stop;
- and
- control means, in response to reception of said emergency stop signal by said receiving means, for inhibiting an output of emergency stop designation to said first control circuit, wherein
- said first controller is configured to turn off the signal in response to reception of said emergency stop signal by said receiving means.
Dependencies are inferred from the claim text.