Device for producing an extreme ultraviolet and soft x radiation from a gaseous discharge
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsWilli Neff, Rainer Lebert, Klaus Bergmann, Oliver Rosier
Life of this patent
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Abstract
The invention relates to a device for generating extreme ultraviolet and soft x-rays from a gas discharge, operated on the left-hand branch of the Paschen curve. There are two main electrodes, between which there is a gas-filled space, and each main electrode exhibits an opening, by means of which an axis of symmetry [(5)] is defined; and there are means to increase the conversion efficiency. Preferred fields of application are those requiring extreme ultraviolet (EUV) radiation or soft x-rays at a wavelength ranging from approximately 1 to 20 nm, and in particular around 13 nm, such as in EUV lithography.
Claims28
A device for generating extreme ultraviolet and soft x-rays from a gas discharge, operated on the left-hand branch of the Paschen curve, comprising:
- two main electrodes, between which there is a gas-filled space, wherein each of said two main electrodes exhibits an opening, defining an axis of symmetry, and wherein the electrodes are formed in such a manner that the gas discharge forms exclusively in the volume, determined by an alignment of the openings;
- and where the plasma channel, generated on the axis of symmetry, is the source for at least one of the extreme ultraviolet and x-rays, and
- a means for increasing conversion efficiency including an auxiliary electrode provided behind the opening of one of the main electrodes.
A device for generating extreme ultraviolet and soft x-rays from a gas discharge, operated on the left-hand branch of the Paschen curve, comprising:
- two main electrodes, between which there is a gas-filled space, wherein each of said two main electrodes exhibits an opening, defining an axis of symmetry, and wherein the electrodes are formed in such a manner that the gas discharge forms exclusively in the volume, determined by an alignment of the openings;
- and where the plasma channel, generated on the axis of symmetry, is the source for at least one of the extreme ultraviolet and x-rays, and
- a means for increasing conversion energy including an auxiliary electrode, which exhibits an opening on the axis of symmetry, provided between the main electrodes.
A device for generating extreme ultraviolet and soft x-rays from a gas discharge, operated on the left-hand branch of the Paschen curve, comprising:
- two main electrodes, between which there is a gas-filled space, wherein each of said two main electrodes exhibits an opening, defining an axis of symmetry, and wherein the electrodes are formed in such a manner that the gas discharge forms exclusively in the volume, determined by an alignment of the openings:
- and where the plasma channel, generated on the axis of symmetry, is the source for at least one of the extreme ultraviolet and x-rays, wherein each of said main electrodes has a plurality of openings.
Dependencies are inferred from the claim text.