Light receiving apparatus, mark detecting apparatus using light receiving apparatus, exposing apparatus, maintenance method of exposing apparatus, manufacturing method of semiconductor device using exposing apparatus and semiconductor manufacturing plant

Abstract

A light receiving apparatus, a mark detecting apparatus or the like, which can generate an image with high accuracy without changing oscillation frequency of an oscillating unit, permit increased accuracy of measurement and reduction of measurement time and contribute to improvement of throughput, include a unit for obtaining storage time when light is received by a CCD camera 8 which is a storage-type position sensor and pulse light emitting frequency of a pulse light emitting apparatus 14 from a cycle of the oscillating unit 7 and predetermined number of pulses of the pulse light emitted from the pulse light emitting apparatus 14 to start storage of the CCD camera 8 and emit the pulse light from the pulse light emitting apparatus 14 by the obtained pulse light emitting frequency.

Dependencies are inferred from the claim text.