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US 6,787,376 B1Granted
Creating a process recipe based on a desired result
AssigneeAdvanced Micro Devices, Inc.
InventorsJason A. Grover, Mark K. Sze-To
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Abstract
A method and apparatus is provided for creating a process recipe based on a desired result. The method comprises providing at least one workpiece to a processing tool for processing, providing the desired result for the workpiece to the processing tool, and generating a recipe for processing the workpiece based on the desired result.
Claims6
A method, comprising:
- providing at least one workpiece to a processing tool for processing;
- providing a desired result for the workpiece to the processing tool;
- and
- generating a recipe for processing the workpiece based on the desired result.
1 more element
Dependencies are inferred from the claim text.