Multi-layer integrated circuit capacitor electrodes

An integrated circuit capacitor electrode comprising:

• a first conductive ring on a face of an integrated circuit substrate, and including a first ring axis that extends orthogonal to the face;
• a second conductive ring on the first conductive ring opposite the substrate and including a second ring axis that extends orthogonal to the face;
• a third conductive ring on the first conductive ring opposite the substrate and including a third ring axis that extends orthogonal to the face, the third ring being located at least partially within the second ring;
• and
• a conductive layer that electrically connects the first, second and third rings.

An integrated circuit capacitor electrode comprising:

• an integrated circuit substrate including a face;
• an insulating layer on the face of the integrated circuit substrate;
• and
• a conductive ring in the insulating layer, and including a ring axis that extends orthogonal to the face, first and second ring walls, a ring floor adjacent the face and a ring roof remote from the face, the insulating layer including a trench therein that exposes the ring roof but does not expose the ring walls.

An integrated circuit capacitor electrode comprising:

• an integrated circuit substrate including a face;
• a conductive ring on the face of the integrated circuit substrate, and including a ring axis that extends orthogonal to the face, first and second ring walls, a ring floor adjacent the face and a ring roof remote from the face;
• and
• a conformal insulating cap on the roof and extending on the first ring wall only partially to the floor.