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AssigneeNEC Corporation
InventorsYoshihiro Hayashi, Jun Kawahara, Hirofumi Ono
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In order to vaporize an organic monomer at a high temperature and a high saturated vapor pressure in good efficiency and to grow an organic polymer film at a high rate in high vacuum by a plasma polymerization reaction of the resulting organic monomer gas, a liquid divinylsiloxanebisbenzocyclobutene (DVS-BCB) monomer is mixed with a carrier gas, and the mixture is then sprayed on a vaporization vacuum chamber held at a high temperature to form an aerosol made of liquid fine particles of the organic monomer, and a BCB monomer (organic monomer) is instantaneously vaporized via the aerosol to generate a BCB monomer gas (organic monomer gas). Consequently, the aerosol having a large specific surface area has a large vaporization area, and vaporization occurs by heating at a high temperature before a polymerization reaction occurs. Thus, 0.1 g/min or more of the BCB monomer gas can be formed at 200° C. and a high saturated vapor pressure, and a plasma polymerization BCB film can be formed at a high rate which is at least 5 times higher than in the ordinary film formation.
A method for vaporization of liquid organic feedstock made of an organic monomer or an organic oligomer capable of forming an organic polymer insulation film by feeding the liquid organic feedstock to a vaporization controller, which comprises:
A method of growing an insulation film on a substrate by the use of a process for vaporization of a liquid organic feedstock, said insulation film being an organic polymer film made of the liquid organic feedstock, said process comprises:
A method of growing an insulation film on a substrate, composing:
Dependencies are inferred from the claim text.