Laterally interconnecting structures
AssigneeLSI Logic Corporation
InventorsMax M. Yeung, Tauman T. Lau, Anwar Ali
Life of this patent
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Abstract
A method of increasing mechanical interlocking between a first structure and a second adjacent structure in an integrated circuit. The first structure is formed with a first surface having a first horizontal component, and the second structure is formed with a second surface having a second horizontal component. The first surface laterally engages the second surface and the first horizontal component is complementary to the second horizontal component, such that the first structure prohibits vertical movement of the second structure.
Claims20
A method of increasing mechanical interlocking between a first structure and a second adjacent structure in an integrated circuit, the method comprising the steps of:
- forming the first structure with a first surface having a first horizontal component, and
- forming the second structure with a second surface having a second horizontal component, where the first surface laterally engages the second surface and the first horizontal component is complementary to the second horizontal component, such that the first structure prohibits vertical movement of the second structure,
- wherein the first surface includes multiple sharp barbs, and the first horizontal component extends substantially linearly and at a substantially constant angle from an upper surface of the second structure to a lower surface of the second structure.
A method of increasing mechanical interlocking between a plurality of layers in an integrated circuit, the method comprising the steps of:
- forming the plurality of layers with at least a bottom layer and an overlying top layer,
- forming an uninterrupted void extending through the top layer and through the bottom layer, where the void has a first surface having a first horizontal component within the top layer and a second surface having a second horizontal component within the bottom layer,
- forming a first structure within the void, where the first structure has a first mating surface having a first complementary horizontal component and a second mating surface having a second complementary horizontal component, where the first mating surface laterally engages the first surface of the top layer and the first complementary horizontal component is complementary to the first horizontal component of the first surface of the top layer, and the second mating surface laterally engages the second surface of the bottom layer and the second complementary horizontal component is complementary to the second horizontal component of the second surface of the bottom layer, such that the first structure prohibits vertical separation of the plurality of layers,
- where the first and second surfaces include sharp barbs, one each of the barbs in each of the plurality of layers and each barb extends substantially linearly and at a substantially constant angle from an upper surface of each of the plurality of layers to a lower surface of each of the plurality of layers.
A method of increasing mechanical interlocking between a first underlying layer and a second overlying layer in an integrated circuit, the method comprising the steps of:
- forming the first layer with an upper surface having a series of elongate first surfaces, each of the first surfaces having an associated first horizontal component,
- forming the second layer on top of the first layer, with a lower surface having a series of second mating surfaces, each of the second mating surfaces having an associated second complementary horizontal component, where the second mating surfaces of the second layer laterally engage the first surfaces of the first layer and the second complementary horizontal components of the second surfaces are complementary to the first horizontal components of the first surfaces, such that the engagement between the first surfaces of the first layer and the second mating surfaces of the second layer prohibit vertical separation of the first layer and the second layer,
- where the first surfaces each include a sharp barb, and each barb extends substantially linearly and at a substantially constant angle from the lower surface of the second layer but does not extend to an upper surface of the second layer.
Dependencies are inferred from the claim text.