Compact rotating stage
AssigneeNanometrics Incorporated
InventorsBlaine R. Spady, Dan M. Colban
Life of this patent
Estimating the term…
Abstract
A compact stage includes a rotary driver and a vertical linear driver that are in the same horizontal plane, which advantageously reduces the height of the device. The stage may include a rotating shaft to which a chuck is mounted. A rotary drive, which may be an annular rotary drive, is coupled to and rotates the rotating shaft. A linear drive is also coupled to the rotating shaft and in one embodiment extends through the center of the annular rotary drive. The linear drive moves the rotating shaft along a vertical axis. The linear drive may be, e.g., a voice coil motor that uses a spring to bias the rotating shaft along the vertical axis.
Claims20
A stage comprising:
- a rotating shaft to which a chuck is mounted;
- an annular rotary drive coupled to said rotating shaft, said rotary drive rotates said rotating shaft;
- and
- a linear drive coupled to said rotating shaft, said linear drive moves said rotating shaft along a vertical axis, said linear drive extending through the center of said annular rotary drive.
A stage comprising:
- a rotating shaft to which a chuck is mounted;
- a means for rotating said rotating shaft;
- and
- a means for driving said rotating shaft along a vertical axis, said means for driving said rotating shaft is on the same horizontal plane as said means for rotating said rotating shaft.
A method of moving a stage, said method comprising:
- driving a shaft along a vertical axis;
- and
- rotating said shaft about the driver that drives said shaft along said vertical axis, such that said shaft and driver are on the same horizontal plane.
Dependencies are inferred from the claim text.