Flexible optoelectronic circuit and associated method
AssigneeMcnc
InventorsWilliam Devereux Palmer, Richard LaBennett
Life of this patent
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Abstract
A flexible optoelectronic circuit is assembled on and released from a substrate, and therefore independent of a substrate. The substrate includes semiconductor substrates having a release layer. The release layer is etched to release the optoelectronic circuit such that the resulting circuit is flexible. Both optical elements, such as waveguides, and conductive elements are formed in layers, generally between insulating layers. The elements may be formed and patterned using standard semiconductor manufacturing techniques.
Claims77
A flexible optoelectronic circuit, comprising:
- a first flexible insulating layer;
- at least one optical element deposited on a portion of the first insulating layer;
- and
- a second flexible insulating layer deposited on the first insulating layer and the at least one optical element, wherein the optoelectronic circuit is independent of a substrate.
A flexible optoelectronic circuit, comprising:
- a first flexible insulating layer;
- a second flexible insulating layer deposited on the first insulating layer, the second insulating layer having at least one optical element pattern defined therein;
- at least one optical element deposited within the at least one optical pattern of the second insulating layer;
- and
- a third flexible insulating layer deposited on the second insulating layer and the at least one optical element, wherein the optoelectronic circuit is independent of a substrate.
An optoelectronic circuit, comprising:
- a substrate;
- a release layer deposited on the substrate;
- a first flexible insulating layer deposited on the release layer;
- at least one optical element deposited on a portion of the first insulating layer;
- and
- a second flexible insulating layer deposited on the first insulating layer and the at least one optical element, wherein the first and second insulating layers comprise a flexible optoelectronic circuit when separated from the substrate and release layer.
A flexible optoelectronic circuit, comprising:
- a first flexible insulating layer having a first refractive index;
- at least one electrical contact deposited within the first insulating layer;
- a first conductive layer deposited on the first insulating layer and in electrical connectivity with the at least one electrical contact;
- a second flexible insulating layer having a second refractive index deposited on the first insulating layer, the second insulating layer having at least one optical element pattern defined therein;
- at least one optical element deposited within the at least one optical pattern of the second insulating layer comprising a material having a third refractive;
- and
- a third flexible insulating layer having a fourth refractive index deposited on the second insulating layer and the at least one optical element the third refractive index being higher than the first, second, and fourth refractive indices, wherein the optoelectronic circuit is independent of a substrate.
A method of forming a flexible optoelectronic circuit, comprising:
- depositing a release layer on a substrate;
- depositing a first flexible insulating layer on the substrate;
- depositing a second flexible insulating layer on the first flexible insulating layer;
- defining at least one optical element pattern in the second flexible layer;
- depositing at least one optical element within the at least one optical element pattern;
- depositing a third flexible insulating layer on the second flexible insulating layer and the at least one optical element;
- and
- releasing the release layer from the first flexible insulating layer so as to remove the release layer and the substrate from the flexible optoelectronic circuit construct.
A method of forming a flexible optoelectronic circuit, comprising:
- depositing a release layer on a substrate;
- depositing a first flexible insulating layer on the substrate;
- depositing at least one optical element on a portion of the first flexible insulating layer;
- depositing a second flexible insulating layer on the first flexible insulating layer and the at least one optical element;
- and
- releasing the release layer from the first flexible insulating layer so as to remove the release layer and the substrate from the flexible optoelectronic circuit construct.
A flexible optoelectronic circuit formed by the process, comprising:
- depositing a release layer on a substrate;
- depositing a first flexible insulating layer on the substrate;
- depositing at least one optical element on the first flexible insulating layer;
- depositing a second flexible insulating layer on the first flexible insulating layer and the at least one optical element;
- and
- releasing the release layer from the first flexible insulating layer so as to remove the release layer and the substrate from the flexible optoelectronic circuit construct.
Dependencies are inferred from the claim text.