Method and device for sorting wafers
AssigneeInfineon Technologies AG
InventorsDirk Caspary, Dorit Kaulfuss
Life of this patent
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AssigneeInfineon Technologies AG
InventorsDirk Caspary, Dorit Kaulfuss
Estimating the term…
A method and a device for sorting wafers from an initial state into an end state. The wafers are at least partly identifiable as elements of a finite sequence based on an information carrier. In the initial state, the wafers are arranged in any desired sequence in compartments of a holding device and in the end state each wafer is arranged in accordance with its position in the sequence in the compartments of the holding device. The first wafer is removed from a first compartment of the holding device. The information carrier of the first wafer is read by a reading device to determine the position of the first wafer in the sequence. Subsequently, a second wafer is removed from a second compartment corresponding to the position of the first wafer in the sequence. The first wafer is moved into the compartment corresponding to its position in the sequence.
A method for sorting wafers of a chip production operation from an initial state into an end state, the method which comprises:
A wafer sorting apparatus, comprising:
Dependencies are inferred from the claim text.