Negative resist composition
AssigneeFuji Photo Film Co., Ltd.
InventorsShoichiro Yasunami, Yutaka Adegawa, Koji Shirakawa
Life of this patent
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Abstract
A negative resist composition comprising (A-1) an alkali-soluble resin containing a repeating unit represented by formula (1) defined in the specification, (A-2) an alkali-soluble resin containing a repeating unit represented by formula (2) defined in the specification, (B) a crosslinking agent crosslinking with the alkali-soluble resin (A-1) or (A-2) by the action of an acid, (C) a compound that generates an acid upon irradiation of an actinic ray or radiation, and (D) a nitrogen-containing basic compound.
Claims10
A negative resist composition comprising (A-1) an alkali-soluble resin containing a repeating unit represented by formula (1) shown below, (A-2) an alkali-soluble resin containing a repeating unit represented by formula (2) shown below, (B) a crosslinking agent crosslinking with the alkali-soluble resin (A-1) or (A-2) by the action of an acid, (C) a compound that generates an acid upon irradiation of an actinic ray or radiation, and (D) a nitrogen-containing basic compound
- wherein A represents a hydrogen atom, an alkyl group, a halogen atom or a cyano group;
- and R1 and R2 each independently represent a hydrogen atom, a halogen atom, a hydroxy group, an alkyl group, an alkenyl group, a cycloalkyl group, an aryl group, an aralkyl group, an alkoxy group, an alkylcarbonyloxy group or an alkylsulfonyloxy group, or R1 and R2 may be combined with each other to form a ring
- wherein, A, R1 and R2 have the same meanings as A, R1 and R2 defined in formula (1) respectively, provided that the alkali-soluble resin (A-2) has the structure different from that of the alkali-soluble resin (A-1).
Dependencies are inferred from the claim text.