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US 6,745,567 B1Granted
System and method for positional movement of microcomponents
AssigneeZyvex Corporation
InventorAndre L. Mercanzini
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Abstract
Systems and methods are disclosed which provide controlled positioning of a microcomponent in a plurality of directions for which control is provided independently. Preferably such controlled translation is provided by a MEMS micro-translation system having a relatively large range of motion, such as bi-directionally along an X axis, which is adapted for production using monolithic manufacturing processes without requiring post-process manufacturing steps. Preferred embodiments provide independent microcomponent translation along multiple axes, e.g., provide translation along an X axis, a Y axis, and/or a rotational axis.
Claims71
A microcomponent translation system providing independently controllable movement in a plurality of directions, said system comprising:
- a first microdevice unit including
- at least a first actuator disposed to provide movement in a first direction of said plurality of directions,
- at least a second actuator disposed to provide movement in a second direction of said plurality of directions, wherein said at least a second actuator is independently controllable, and
- a first insulator disposed between said first actuator and said second actuator and providing mechanical communication therebetween, wherein said first insulator provides electrical isolation with respect to said first actuator and said second actuator, wherein movement of said at least a first actuator in the first direction results in corresponding movement in the first direction by said at least a second actuator while said at least a second actuator remains inactive, wherein after removing said first microdevice unit from a monolithic lay-up, providing a control signal to the first actuator to move said first microdevice unit in the first direction, and providing a control signal to the second actuator to move said first microdevice in the second direction, wherein control of said first actuator to move said first microdevice unit in said first direction and control of said second actuator to move said first microdevice unit in said second direction is independent.
1 more element
A microcomponent translation system providing independently controllable movement in a plurality of directions, said system comprising:
- a first microdevice unit for providing controlled movement in a first direction;
- and
- a second microdevice unit for providing controlled movement in a second direction, wherein control of said second microdevice unit is independent of control of said first microdevice unit, wherein said second microdevice unit is moved in said first direction by operation of said first microdevice unit while the second microdevice unit remains inactive, wherein after removing said first microdevice unit from a monolithic lay-up, providing a control signal to a first actuator to move said first microdevice unit in the first direction, and providing a control signal to a second actuator to move said first microdevice in a third direction, wherein control of said first actuator to move said first microdevice unit in said first direction and control of said second actuator to move said first microdevice unit in said third direction is independent.
A method for providing positioning of microcomponents, said method comprising:
- providing a first translation stage of a first device unit;
- providing a second translation stage of a second device unit;
- electrically isolating a first actuator of said first device unit and an actuator of said second device unit;
- providing a control signal to said actuator of said first device unit to move said first translation stage in a first direction, wherein movement of said first translation stage results in a corresponding movement in said second translation stage;
- providing a control signal to said actuator of said second device unit to move said second translation stage in a second direction, wherein movement of said second translation stage is free of corresponding movement in said first translation stage;
- and
- after removing said first device unit from a monolithic lay-up, providing a control signal to said first actuator to move said first device unit in the first direction, and providing a control signal to a second actuator to move said first device in a third direction, wherein control of said first actuator to move said first device unit in said first direction and control of said second actuator to move said first device unit in said third direction is independent.
4 more elements
A method for providing positioning of microcomponents, said method comprising:
- monolithically laying-up a first device unit;
- monolithically laying-up a second device unit, wherein said first device unit and said second device unit are laid-up in a same monolithic lay-up;
- providing electrical isolation of an actuator of said first device unit and an actuator of said second device unit;
- after removing said first device unit from said monolithic lay-up providing a control signal to said actuator of said first device unit to move said first translation stage in a first direction, wherein movement of said first translation stage results in a corresponding movement in said second translation stage in said first direction;
- and
- after removing said second device unit from said monolithic lay-up providing a control signal said actuator of said second device unit to move said second translation stage in a second direction, wherein movement of said second translation stage is free of corresponding movement in said first translation stage.
3 more elements
A method for providing positioning of microcomponents, said method comprising:
- monolithically laying-up a first device unit, wherein said first device unit includes a first actuator associated with first device unit movement in a first direction and a second actuator associated with first device movement in a second direction;
- and
- providing electrical isolation of said first actuator and said second actuator, wherein said electrical isolation is provided by an insulating material deposited in a monolithic lay-up of said first device unit in a same stratum as at least a portion of said first actuator and said second actuator;
- after removing said first device unit from said monolithic lay-up providing a control signal to said first actuator to move said first device unit in a first direction, and providing a control signal to said second actuator to move a first translation stage in a second direction, wherein control of said first actuator to move said first device unit in said first direction and control of said second actuator to move said first device unit in said second direction is independent.
1 more element
Dependencies are inferred from the claim text.