Contactor for semiconductor device and contact method
AssigneeFujitsu Limited
InventorsMasaru Tateishi, Toshihisa Watanabe, Hiroyuki Tokuyama
Life of this patent
Estimating the term…
Abstract
A contactor for a semiconductor device comprises a placing table, lower side contactors, upper side contactors and a pressure part. A semiconductor device is placed on the placing table. The lower side contactors contact terminals of the semiconductor device from lower sides when the semiconductor device is placed on the placing table. The upper side contactors have heads that can move up and down with respect to the terminals of the semiconductor device placed on the placing table. The pressure part moves the heads toward the terminals of the semiconductor device by pressing the upper side contactors so as to elastically deform the upper side contactors.
Claims11
A contactor for a semiconductor device, comprising:
- a placing table on which the semiconductor device is placed;
- lower side contactors contacting terminals of the semiconductor device from a lower side when the semiconductor device is placed on the placing table;
- upper side contactors having heads that are movable up and down with respect to the terminals of the semiconductor device placed on the placing table;
- and
- a pressure part for moving the heads toward the terminals of the semiconductor device by pressing the upper side contactors so as to elastically deform the upper side contactors and rotationally turn the upper side contactors about a plurality of points along each said upper side contactor.
A contactor for a semiconductor device, comprising:
- a placing table on which the semiconductor device is placed;
- lower side contactors contacting terminals of the semiconductor device from a lower side when the semiconductor device is placed on the placing table;
- upper side contactors having heads that are movable up and down with respect to the terminals of the semiconductor device placed on the placing table;
- and
- a pressure part for moving the heads toward the terminals of the semiconductor device by pressing the upper side contactors so as to elastically deform the upper side contactors, wherein
- the lower side contactors and the upper side contactors are separate parts and insulated from each other.
A contactor for a semiconductor device, comprising:
- a placing table on which the semiconductor device is placed;
- lower side contactors contacting terminals of the semiconductor device from a lower side when the semiconductor device is placed on the placing table;
- upper side contactors having heads that are movable up and down with respect to the terminals of the semiconductor device placed on the placing table;
- and
- a pressure part for moving the heads toward the terminals of the semiconductor device by pressing the upper side contactors so as to elastically deform the upper side contactors, wherein
- the pressure part is positioned above the placing table and has an opening larger than an outer dimension of the semiconductor device.
A contactor for a semiconductor device, comprising:
- a placing table on which the semiconductor device is placed;
- lower side contactors contacting terminals of the semiconductor device from a lower side when the semiconductor device is placed on the placing table;
- upper side contactors having heads that are movable up and down with respect to the terminals of the semiconductor device placed on the placing table;
- and
- a pressure part for moving the heads toward the terminals of the semiconductor device by pressing the upper side contactors so as to elastically deform the upper side contactors, wherein
- each of the upper side contactors has a base part and an arm part;
- the head is formed at an end of the arm part;
- and the arm part is elastically rotatable centered on a connecting part connecting the arm part with the base part.
A contact method that obtains electrical contact with terminals of a semiconductor device, comprising the steps of:
- placing the semiconductor device on a placing table from above the placing table through an opening of a pressure part, and at the same time, making the terminals of the semiconductor device contact lower side contactors arranged around the placing table;
- lowering the pressure part so as to press upper side contactors, elastically deforming the upper side contactors, and moving heads of the upper side contactors toward the terminals of the semiconductor device;
- and
- making the heads of the upper side contactors contact the terminals of the semiconductor device on a side opposite to the lower side contactors and giving contact pressure to the terminals of the semiconductor device by putting the terminals between the lower side contactors and the upper side contactors.
Dependencies are inferred from the claim text.