Method for aligning conveying position of object processing system, and object processing system

Abstract

There is provided a processing system for processing a processing object, capable of precisely and efficiently carrying out alignment during a teaching operation. In a processing system for processing a processing object, the processing system comprising: processing apparatuses 12A and 12B, which have supporting tables 14A and 14B for supporting thereon objects to be processed, respectively, and which serve to carry out a predetermined processing for the processing objects; an orienter/positioner 32 for detecting an eccentric quantity and eccentric direction of the processing object mounted on a reference table 52; at least one transfer mechanism 20, 40A, 40B provided between the orienter/positioner and the processing apparatus; and a control part 70 for controlling the transfer mechanism and the orienter/positioner, the control part obtains a position shift quantity of the aligning substrate when the transfer mechanism causes the to-and-fro conveyance of the aligning substrate between the reference table and the supporting table to return the aligning substrate, as a to-and-fro position shift quantity, and obtains a position shift quantity of the aligning substrate when the aligning substrate precisely aligned to be mounted on the supporting table is conveyed to the reference table by the transfer mechanism, as a one-way position shift quantity, the control part modifying an conveying position of a processing object, which is conveyed toward the supporting table by the transfer mechanism, on the basis of the to-and-fro position shift quantity and the one-way position shift quantity. Thus, alignment during a teaching operation is precisely and efficiently carried out.

Dependencies are inferred from the claim text.