Inspection system for process devices for treating substrates, sensor intended for such inspection system, and method for inspecting process devices
AssigneeASM International N.V.
InventorOtto Cornelius Jonkers
Life of this patent
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Abstract
The invention relates to an inspection system for process equipment for treating substrates, such as, for instance, semiconductor wafers or flat panel displays. The system is provided with a wireless sensor with which the interior of the process device can be inspected. The sensor is provided with a transmitter to transfer a signal, during inspection of the interior of the process device, to a receiver disposed outside the process device. The wireless sensor is arranged on a support having substantially the same dimensions as the substrates to be treated.
Claims15
An inspection system for process equipment for treating substrates, semiconductor wafers or flat panel displays, the system being provided with a wireless sensor with which the interior of the process device can be inspected, the sensor being provided with a transmitter to transfer a signal, during inspection of the interior of the process device, to a receiver located outside the process device, the wireless sensor being arranged on a support having substantially the same dimensions as the substrates to be treated, wherein the sensor includes a micro video camera.
A sensor provided with a transmitter for wireless communication, for inspecting the interior of a process device for treating substrates, the sensor being arranged on a support having substantially the same shape and dimensions as the substrates to be treated, wherein the sensor includes a micro video camera.
A method for inspecting the interior of a process device for treating substrates, wherein the process device is provided with an input/output station for the input/output of substrates, at least one process chamber for treating substrates and substrate transport means to transport the substrates from the input/output station to the process chamber and vice versa, wherein a sensor provided with a transmitter is placed on the input/output station and is transported with the substrate transport means to the interior of the process device for performing the inspection, wherein during the inspection the transmitter transmits a signal which can be received with a receiver disposed outside the process device, and wherein after completion of the inspection the sensor is placed on the input/output station again with the substrate transport means, wherein the sensor is a camera and the inspection is a visual inspection.
Dependencies are inferred from the claim text.