Cleaning nozzle and substrate cleaning apparatus
AssigneeDainippon Screen Mfg. Co., Ltd.
InventorsSadao Hirae, Masanobu Sato, Shuichi Yasuda
Life of this patent
Estimating the term…
Abstract
A cleaning nozzle includes a mixing portion with inner walls thereof formed of quartz given smoothing treatment. As a result, the inner walls of the mixing portion have smooth surfaces. This construction effectively suppresses abrasion of the inner walls of the mixing portion, and particle generation from the cleaning nozzle. Further, the cleaning nozzle has a supply pipe surrounding a gas introduction pipe. This reduces areas of contact in the mixing portion between a gas and inner walls of the cleaning nozzle, to suppress particle generation with increased effect.
Claims23
A cleaning nozzle having a mixing portion for mixing a cleaning liquid and a pressurized gas to form mist, and discharging said mist formed in said mixing portion;
- wherein said cleaning nozzle has at least inner walls of said mixing portion presenting smooth surfaces;
- said smooth surfaces being provided by an etching treatment.
A substrate cleaning apparatus for cleaning a substrate by supplying a cleaning liquid turned into mist to the substrate, said apparatus comprising:
- a cleaning nozzle having a mixing portion for mixing the cleaning liquid and a pressurized gas to form mist, and discharging said mist formed in said mixing portion;
- wherein said cleaning nozzle has at least inner walls of said mixing portion presenting smooth surfaces;
- said smooth surfaces being provided by an etching treatment.
A cleaning nozzle having a mixing portion for mixing a cleaning liquid and a pressurized gas to form mist, and discharging said mist formed in said mixing portion;
- wherein said cleaning nozzle has at least inner walls of said mixing portion formed of quartz;
- and
- wherein said mixing portion is constructed with a supply pipe for supplying the cleaning liquid surrounding a gas introduction pipe for introducing the gas.
A substrate cleaning apparatus for cleaning a substrate by supplying a cleaning liquid turned into mist to the substrate, said apparatus comprising:
- a cleaning nozzle having a mixing portion for mixing the cleaning liquid and a pressurized gas to form mist, and discharging said mist formed in said mixing portion;
- and
- a tip portion disposed downstream of said mixing portion in a direction of discharge of said mist;
- wherein said mixing portion and said tip portion have at least inner walls formed of quartz to be integral with each other.
A substrate cleaning apparatus for cleaning a substrate by supplying a cleaning liquid turned into mist to the substrate, said apparatus comprising:
- a cleaning nozzle having a mixing portion for mixing the cleaning liquid and a pressurized gas to form mist, and discharging said mist formed in said mixing portion;
- wherein said cleaning nozzle has at least inner walls of said mixing portion formed of quartz;
- and
- wherein said mixing portion is constructed with a supply pipe for supplying the cleaning liquid surrounding a gas introduction pipe for introducing the gas.
A cleaning nozzle having a mixing portion for mixing a cleaning liquid and a pressurized gas to form mist, and discharging said mist formed in said mixing portion;
- wherein said cleaning nozzle has at least inner walls of said mixing portion presenting smooth surfaces;
- and
- wherein said mixing portion is constructed with a supply pipe for supplying the cleaning liquid surrounding a gas introduction pipe for introducing the gas.
A substrate cleaning apparatus for cleaning a substrate by supplying a cleaning liquid turned into mist to the substrate, said apparatus comprising:
- a cleaning nozzle having a mixing portion for mixing the cleaning liquid and a pressurized gas to form mist, and discharging said mist formed in said mixing portion;
- wherein said cleaning nozzle has at least inner walls of said mixing portion presenting smooth surfaces;
- and
- wherein said mixing portion is constructed with a supply pipe for supplying the cleaning liquid surrounding a gas introduction pipe for introducing the gas.
A cleaning nozzle having a mixing portion for mixing a cleaning liquid and a pressurized gas to form mist, and discharging said mist formed in said mixing portion, said cleaning nozzle comprising:
- a tip portion disposed downstream of said mixing portion in a direction of discharge of said mist;
- wherein said mixing portion and said tip portion have at least inner walls formed of quartz to be integral with each other.
Dependencies are inferred from the claim text.