Methods and apparatus for diffractive optical processing using an actuatable structure

A method of processing a first optical carrier of a wavelength-division multiplexed signal using a diffracting optical element having a plurality of reflective grating elements and a main pathway, comprising:

• supporting a plurality of actuating beams over a substrate, each of the plurality of actuating beams forming a corresponding actuation gap relative to the substrate, the plurality of actuating beams forming a plurality of rows, each row including a corresponding at least two of the plurality of actuating beams;
• supporting each of the plurality of grating elements over a corresponding one of the plurality of rows of actuating beams to form a corresponding auxiliary gap therebetween;
• directing the first optical carrier along the main pathway and onto a portion of each of the plurality of grating elements;
• and
• positioning at least one of the plurality of grating elements relative to the Substrate by actuating the at least two of the actuating beams corresponding to at least one of the plurality of rows of actuating beams, the positioning modifying the optical strength of the first optical carrier along the main pathway, whereby the planarity of the at least one of the plurality of grating elements is maintained over the portion of the at least one of the plurality of grating elements onto which the beam of light is directed.

An optical processing apparatus comprising:

• (A) an optical source to produce a beam having light of a first wavelength and light of a second wavelength;
• (B) a diffracting optical element having a main pathway, arranged to receive the beam of light along a main pathway, the diffracting optical element having,
• (i) a plurality of conductive actuating beams each supported over a substrate by a corresponding at least two actuation beam support posts, each of the plurality of actuating beams forming an actuation gap relative to the substrate, the plurality of conductive actuating beams arranged to form a plurality of rows of actuating beams, each row of actuating beams including at least two of the plurality of actuating beams,
• (ii) a plurality of grating elements arranged to receive the beam of light, each of the plurality of grating elements supported over a corresponding one of the plurality of rows of actuating beams by a corresponding at least two auxiliary beam support post, the corresponding at least two auxiliary beam support posts arranged to form an auxiliary gap between one of the plurality of grating elements and the corresponding one of a plurality of rows of actuating beams, the auxiliary beam posts located such that upon actuation of the actuating beams corresponding to a row of actuating beams in the direction of the substrate, the corresponding grating element is displaced in the direction of the substrate and planarity of the grating element is maintained, and
• (iii) at least one electrode disposed on the substrate;
• (B) a controller adapted to establish a voltage between the at least one electrode and the at least two actuating beams corresponding to one of the plurality of the plurality of rows of actuating beams, in a manner such that upon establishment of the voltage, at least a portion of one of the light of a first wavelength and the light of a second wavelength is diffracted out of the main pathway.