US 6,723,651 B2Granted

Plasma processing method

AssigneeMatsushita Electric Industrial Co., Ltd.

InventorsKiyoshi Arita, Tetsuhiro Iwai, Shoji Sakemi

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Abstract

A method of plasma processing a silicon-containing object to be processed at a high etching rate without causing a surface of the object to have a hazy appearance, so that this surface can have an excellent visual quality. In the plasma processing method of etching the surface of the semiconductor wafer, gas containing sulfur hexafluoride and helium is used as a plasma-generating gas. A fluorine radical as an active substance which reacts with silicon of the surface of the semiconductor wafer, gaseous silicon tetrafluoride yielded by the reaction and a compound (SFn) of fluorine and sulfur that is generated as a reaction product are removed by the helium gas functioning as carrier gas. The helium gas prevents the reaction product from adhering to the surface of the wafer again.

Claims6

Dependent claims

A plasma-processing method for forming a mirror-like etched surface on an object, said method comprising:

providing an apparatus comprising:
a process chamber;
a mounting unit located in the process chamber and for holding an object having a surface to be etched;
and
an electrode located in the processing chamber and facing the mounting unit, the electrode having a hole therein, the hole opening towards the mounting unit;
mounting an object on the mounting unit;
generating a plasma by blowing a plasma-generating from the hole to a surface of the object to be etched and causing a plasma discharge by applying a high frequency voltage between the mounting unit and the electrode, the plasma-generating gas containing a first amount of sulfur hexafluoride and a second amount of helium, the plasma-generating gas containing more helium than sulfur hexafluoride;
etching said surface with the generated plasma, thereby forming at least one reaction product;
and
removing said at least one reaction product from said surface by blowing the plasma generating gas onto said surface simultaneously with etching of said surface until said surface becomes mirror-like.

7 more elements

Dependencies are inferred from the claim text.