Device for step-and-repeat exposure of a substrate

A device for the step-and-repeat exposure of a substrate comprising

• a work piece carrier for receiving a substrate bearing several rectangular exposure zones having unequal length and width dimensions wherein the exposure zones on the substrate are progressively moved in rows to an exposure position by the work piece carrier,
• an exposure means in which light emerging along an optical axis from a light source is emitted via a compound lens onto a mask having a rectangular shape mask pattern thereon having unequal length and width dimensions, said compound lens being formed by a parallel arrangement in the lengthwise and transverse direction of a plurality lenses, such that a cross section of each lens of the compound lens has a rectangular shape in the direction perpendicular to the optical axis having unequal length and width dimensions, and in which the mask pattern is progressively exposed onto a respective rectangular exposure zone on the substrate,
• wherein the compound lens is supported within a holding part to be rotated between a first position and a second position, the second position being 90° offset from the first position around the optical axis of the light which is incident on the compound lens such that the position of the compound lens can be switched from either the first position or the second position depending on which of the length and width is longer in the arrangement of the rectangular exposure zones on the substrate.