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US 6,720,851 B2Granted
Micro electromechanical switches
AssigneeTelefonaktiebolaget LM Ericsson (publ)
InventorsPaul Hallbjörner, Erik Carlsson
Life of this patent
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Abstract
Characteristics of micro electromechanical switches can be changed by applying a control signal which either changes one or more parameters of the micro electromechanical switches or which controls beam movement by feedback signals. It is thereby possible to change switching transient time, maximum switching frequency, power tolerance, and/or sensitivity (actuation voltage) of a micro electromechanical switch.
Claims8
A micro electromechanical switching structure comprising:
- a switching element including a first switching support;
- a switching actuator control electrode;
- a switching beam having a first end and a second end, the first end of the switching beam being supported by the first switching support;
- a first reconfiguration support, spaced apart from the first switching support;
- a first reconfiguration beam including a first end and a second end, the first end of the first reconfiguration beam being supported by the first reconfiguration support and the second end of the first reconfiguration beam being supported by the first switching support;
- and
- a first reconfiguration actuator control electrode being arranged between the first reconfiguration support and the first switching support
- wherein the first switching support is ductile to thereby enable transfer to the switching beam of tension variations of the first reconfiguration beam caused by actuation of the first reconfiguration beam by the first reconfiguration actuator control electrode, which actuation thereby changes a characteristic of the switching element.
5 more elements
Dependencies are inferred from the claim text.