Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method

A planar motor comprising:

• a stator having a coil;
• and a mover having a magnet, the planar motor moving the mover on a movement plane by eletromagnetic force which is generated between the coil and the magnet, further comprising:
• a controller that controls position of the mover based on information concerning an inductance of the coil, the inductance varying in accordance with the relative-position relation between the stator and the mover.

A driving method that drives a planar motor comprising:

• a stator having a coil;
• and a mover having a magnetic flux generator, so as to move the mover on a movement plane by electromagnetic force which is generated between the coil and the magnetic flux generator,
• wherein position information of the mover is detected based on information concerning an inductance of the coil, the inductance varying in accordance with the relative-position relation between the stator and the mover.

A driving method that drives a planar motor comprising:

• a stator having a coil;
• and a mover having a magnet, so as to move the mover on a movement plane by electromagnetic force which is generated between the coil and the magnet,
• wherein position of the mover is controlled based on information concerning an inductance of the coil, the inductance varying in accordance with the relative-position relation between the stator and the mover.

A driving method that drives a stage unit comprising a stage member moving on a movement plane and a driving unit comprising a mover which has a magnetic flux generator and which is provided on the stage member and a stator having a plurality of coils and driving the stage member by electromagnetic force which is generated between the coils and the magnetic flux generator,

• wherein respective electric currents supplied to the plurality of coils are controlled based on results of measuring inductances of the plurality of coils.

A driving method that drives a planar motor comprising:

• a stator having a coil;
• and a mover having a magnetic flux generator, so as to move the mover on a movement plane, wherein the magnetic flux generator comprises a plurality of magnets magnetized in a direction not perpendicular to the movement plane, and
• wherein position information of the mover is detected based on information concerning an inductance of the coil, the inductance varying in accordance with the relative-position relation between the stator and the mover.

A driving method that drives a stage unit comprising a stage member moving on a movement plane and a driving unit comprising a mover which has a magnetic flux generator comprising a plurality of magnets magnetized in a direction not perpendicular to the movement plane and which is provided on the stage member, and a stator having a plurality of coils and driving the stage member by electromagnetic force,

• wherein respective electric currents supplied to the plurality of coils are controlled based on results of measuring inductances of the plurality of coils.

A driving method that drives a stage unit comprising:

• a stage member moving on a movement plane and a driving unit comprising a mover which has a magnetic flux generator and which is provided on the stage member and a stator having a plurality of coils and driving the stage member by electromagnetic force,
• wherein the stage unit further comprises a position detection unit to detect position of the stage member, and
• wherein respective electric currents supplied to the plurality of coils are controlled based on at least one of a detection result by the position detection unit and a set of measurement results of the inductances.