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US 6,720,604 B1Granted
Capacitor for an integrated circuit
AssigneeAgere Systems Inc.
InventorsLarry Bruce Fritzinger, Nace Layadi, Sailesh Mansinh Merchant, Pradip Kumar Roy
Life of this patent
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Abstract
The present invention provides a capacitor comprising a conductive plug comprising a top surface and exposed sidewalls, wherein the sidewalls comprise a layer selected from the group consisting of titanium and titanium nitride, and an electrode material layer over the conductive plug sidewalls, wherein the layer of electrode material is not titanium nor titanium nitride.
Claims16
A capacitor comprising:
- a conductive plug comprising a top surface and exposed sidewalls, wherein the sidewalls comprise a layer selected from the group consisting of titanium and titanium nitride;
- an electrode material layer in direct contact with at least a portion of the conductive plug sidewalls, wherein the layer of electrode material is not titanium nor titanium nitride.
A capacitor comprising:
- a conductive plug comprising a top surface and exposed sidewalls, wherein the sidewalls comprise a layer selected from the group consisting of titanium and titanium nitride, wherein the conductive plug is selected from the group consisting of tungsten, copper, aluminum and doped polysilicon;
- an electrode material layer in direct contact with at least a portion of the conductive plug sidewalls, wherein the electrode material layer is selected from the group consisting of tungsten, tungsten nitride, tungsten silicide, tungsten silicide nitride and mixtures thereof.
A capacitor comprising:
- a tungsten plug comprising a top surface and exposed sidewalls, wherein the sidewalls comprise a layer selected from the group consisting of titanium and titanium nitride;
- a tungsten electrode material layer in direct contact with at least a portion of the tungsten plug sidewalls.
Dependencies are inferred from the claim text.