Method and apparatus for laser drilling

A laser drilling method for carrying out drilling by irradiating a workpiece with a laser beam from a laser oscillator, wherein said laser beam is projected traveling through a shaping optical system for shaping the laser beam into a line or rectangle, a polygon mirror, a mask having a mask pattern including a plurality of holes for defining a processing pattern, at least one galvano-mirror, and a processing lens, said polygon mirror sweeps said laser beam so that the laser beam scans across the plurality of holes in said mask to thereby collectively forming a plurality of holes into said workpiece, and an irradiation region of said laser beam is shifted in one axis direction by said at least one galvano-mirror.

A laser drilling apparatus for carrying out drilling by irradiating a workpiece with a laser beam from a laser oscillator, wherein:

• a polygon mirror, a mask having a mask pattern including a plurality of holes for defining a processing pattern, at least one galvano-mirror, and a processing lens are arranged between said laser oscillator and said workplace, the laser beam from said laser oscillator being projected onto said workpiece traveling through these components,
• said polygon mirror sweeps said laser beam so that the laser beam scans across the plurality of holes in said mask to thereby forming a plurality of holes into said workpiece, and
• an irradiation region of said laser beam is shifted in one axis direction by said at least one galvano-mirror.

A laser drilling apparatus for carrying out drilling by irradiating a workpiece with a laser beam from a laser oscillator, wherein:

• a shaping optical system for shaping said laser beam into a line or rectangle, a polygon mirror, a mask having a mask pattern including a plurality of holes for defining a processing pattern, at least one galvano-mirror, and a processing lens are arranged between said laser oscillator and said workpiece, the laser beam from said laser oscillator being projected onto said workpiece traveling through these components,
• said polygon mirror sweeps said laser beam so that the laser beam scans across the plurality of holes in said mask to thereby collectively forming a plurality of holes into said workpiece, and
• an irradiation region of said laser beam is shifted in one axis direction by said at least one galvano-mirror.