Vapor controlled czochralski (VCZ) single crystal growth apparatus

The straight pulling single crystal growing apparatus of steam pressure control comprising:

• a single crystal furnace;
• a heating unit;
• a mechanical transmission unit;
• a gaseous adjustment unit;
• a hot-sealed container mounted in the single crystal furnace, within the hot-sealed container mounted a crucible;
• and
• a crucible-transmitting shaft and a seed crystal shaft inserted into the hot-sealed container through respective sealing devices, said hot-sealed container including an upper container part and a lower container part;
• and
• a sealing connection device provided between the upper and lower container parts, wherein said sealing device through which the crucible-transmitting shaft and the seed crystal shaft pass is formed of a sealing chamber and a sealing ring, and the sealing chamber has an annular groove therein and a central hole at its bottom, and wherein said sealing ring has a groove, and is affixed to said sealing chamber such that the outer peripheral surface of the scaling ring fits tightly with the inner surface of the sealing chamber, and the groove of the sealing ring and the annular groove of the sealing chamber face each other to form a liquid storage chamber in which melted boron oxide liquid is filled to form a tight seal.