Laser interferometry force-feedback sensor for an interfacial force microscope

In a scanning force microscope, the improvement for independently determining interfacial forces between a probe and a sample along multiple axes, comprising:

• means for producing at least two collimated light beams;
• a deflecting member, comprising a common plate suspended above at least two capacitor electrodes situated on a substrate with a probe on the surface of the common plate opposite the surface suspended above the at least two capacitor electrodes, said probe interacting with a surface of the sample, said common plate situated opposite said substrate to produce two independent interference cavities;
• a beam splitter situated between said means for producing at least two collimated light beams and said deflecting member, said beam splitter directing a portion of the at least two collimated light beams perpendicularly through a back side of the substrate;
• a mirror situated in the path of the at least two collimated light beams for directing reflected light beams into at least two detectors for measuring the intensity of said reflected light beams;
• and
• electronic means for processing algorithms based on beam intensity to independently determine interfacial forces between said probe and said sample along multiple axes.
• 11.The scanning force microscope of claim 10 wherein said means for producing at least two collimated light beams comprises at least two light sources directed through collimating lenses.

In a scanning force microscope, the improvement for independently determining interfacial forces between a probe and a sample along three axes, comprising:

• means for producing three collimated light beams;
• a deflecting member, comprising a common plate suspended above three capacitor electrodes situated on a substrate with a probe on the surface of the common plate opposite the surface suspended above the three capacitor electrodes, said probe interacting with a surface of the sample, said common plate situated opposite said substrate to produce three independent interference cavities;
• a beam splitter situated between said means for producing three collimated light beams and said deflecting member, said beam splitter directing a portion of each of the three collimated light beams perpendicularly through a back side of the substrate;
• a mirror situated in the path of the three collimated light beams for directing reflected light beams into three detectors for measuring the intensity of said reflected light beams;
• and
• electronic means for processing algorithms based on beam intensity to independently determine interfacial forces between said probe and said sample along three axes.