ESD guard structure
AssigneeInfineon Technologies AG
InventorHarald Gossner
Life of this patent
Estimating the term…
Abstract
An ESD guard structure includes a self-aligned lateral p+/n+ diode serving as the trigger diode. This lateral trigger diode is largely independent of alignment precisions. The n+ and p+ regions are implanted on opposite sides of a gate electrode. The edges of the resist masks of the respective process diffusions are placed onto this gate electrode such that they always rest on the gate electrode, within the limits of the alignment capabilities. This way, the spacing between the n+ region and the p+ region is defined solely by the length or width of the gate electrode, which can be closely controlled. This technique is limited only by the requirement that the minimum gate electrode length must be no less than twice the maximum alignment precision.
Claims18
In combination with an integrated circuit, an electro-static discharge guard structure for protecting the integrated circuit, the guard structure comprising:
- a terminal pad and an electrically conductive connection connecting said terminal pad to the integrated circuit;
- a terminal connected to a reference potential;
- a guard element having a load path connected between said terminal pad and said terminal, said guard element having a control terminal;
- and
- a lateral Positive-Isolating-Negative (PIN) trigger diode having a low breakdown voltage, said trigger diode for switching said guard element through when the breakdown voltage is exceeded, said trigger diode configured between said control terminal of said guard element and said terminal pad;
- a gate electrode having a length and a width;
- said trigger diode including an anode zone and a cathode zone, said anode zone containing a dopant of a first conductivity type, and said cathode zone containing a dopant of a second conductivity type;
- said anode zone and said cathode zone being aligned with respect to said gate electrode;
- and
- said anode zone and said cathode zone being spaced apart a distance corresponding to a dimension selected from the group consisting of said width of said gate electrode and said length of said gate electrode.
In combination with an integrated circuit, an electro-static discharge guard structure for protecting the integrated circuit, the guard structure comprising:
- a terminal pad and an electrically conductive connection connecting said terminal pad to the integrated circuit;
- a terminal connected to a reference potential;
- a guard element having a load path. connected between said terminal pad and said terminal, said guard element having a control terminal;
- and
- a lateral trigger diode having a breakdown voltage, said trigger diode for switching said guard element through upon the breakdown voltage being exceeded, said trigger diode configured between said control terminal of said guard element and said terminal pad;
- a gate electrode having a length and a width;
- said trigger diode including an anode zone and a cathode zone, said anode zone containing a dopant of a first conductivity type, and said cathode zone containing a dopant of a second conductivity type;
- said anode zone and said cathode zone being aligned with respect to said gate electrode;
- and
- said anode zone and said cathode zone being spaced apart a distance corresponding to a dimension selected from the group consisting of said width of said gate electrode and said length of said gate electrode, said dimension being at least twice as large as a maximum alignment precision.
In combination with an integrated circuit, an electro-static discharge guard structure for protecting the integrated circuit, the guard structure comprising:
- a terminal pad and an electrically conductive connection connecting said terminal pad to the integrated circuit;
- a terminal connected to a reference potential;
- a guard element having a load path connected between said terminal pad and said terminal, said guard element having a control terminal;
- and
- a lateral trigger diode having a breakdown voltage, said trigger diode for switching said guard element through upon the breakdown voltage being exceeded, said trigger diode configured between said control terminal of said guard element and said terminal pad;
- a gate electrode having a length and a width;
- said trigger diode including an anode zone and a cathode zone, said anode zone containing a dopant of a first conductivity type, and said cathode zone containing a dopant of a second conductivity type;
- said anode zone and said cathode zone being aligned with respect to said gate electrode;
- said anode zone and said cathode zone being spaced apart a distance corresponding to a dimension selected from the group consisting of said width of said gate electrode and said length of said gate electrode;
- and
- a switching device for adjusting the breakdown voltage of said trigger diode, said switching device being connected to said gate electrode.
Dependencies are inferred from the claim text.