Semiconductor integrated circuit system

A semiconductor integrated circuit system comprising:

• a semiconductor substrate;
• first and second semiconductor devices formed on the substrate and required to have properties substantially the same as each other in operation, the first and second semiconductor devices respectively including first and second channel regions arranged in a surface of the substrate, and first and second gate electrodes disposed on the first and second channel regions via gate insulating films;
• first and second wiring layers connected to the first and second the gate electrodes, respectively;
• and
• a relaxing structure configured to relax fluctuation in the properties of the first and second semiconductor devices, the fluctuation being caused by electrical effects of plasma when a plasma process is performed for manufacturing the system,
• wherein the relaxing structure comprises first and second short-circuiting elements respectively connected to the first and second wiring layers and substantially equivalent to each other, the first and second short-circuiting elements being configured to short-circuit the first and second gate electrodes with the first and second channel regions, respectively, when the first and second wiring layers are supplied with electrical potentials beyond operation ranges of electrical potentials, which are applied to the first and second gate electrodes in the operation of the first and second semiconductor devices, respectively.