Electrodes for ferroelectric components
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsKiyoshi Uchiyama, Keisuke Tanaka
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Abstract
A ferroelectric integrated circuit including a substrate supporting a thin film ferroelectric material and an electrode layer in contact with the ferroelectric material, the ferroelectric material comprising a compound including a metal element, the electrode comprising the metal element. The metal element of the ferroelectric material may exist in the electrode in the pure metal form, as an alloy, as part of a crystalline compound, or as part of an amorphous material. The electrodes may be formed by a single layer, or as multi-layer structures, providing the layer adjacent the ferroelectric contains at least one of the metal elements of the ferroelectric. The electrode is formed at the eutectic temperature of its constants.
Claims13
A ferroelectric integrated circuit, comprising:
- a thin film of ferroelectric layered superlattice material including a superlattice generator metal;
- and
- a non-oxide electrode layer in contact with said thin film of layered superlattice material, said non-oxide electrode layer comprising said superlattice generator metal at a concentration greater than 10 atomic percent.
Dependencies are inferred from the claim text.