Method for forming a resistor to replace a N-well resistor
AssigneeUnited Microelectronics Corp.
InventorsChih-Hung Chen, Sung-Dtr Wu
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Abstract
The present invention relates to a method for forming a non-salicide p+ polysilicon resistor used to replace a N-well resistor. In the low power SRAM process whose window is lower than 0.15 μm, it is found that non-salicide p+ polysilicon resistor has minor temperature dependence and also has layout benefit. In addition, the non-salicide p+ polysilicon resistor is decreased at high temperature. Therefore, it is good benefit to reduce the RC timing delay, which would compensate the inherent MOS mobility deceleration at high temperature, when the non-salicide p+ polysilicon resistor of the present invention is used to replace the N-well resistor.
Claims9
A method for forming a resistor to replace a N-well resistor, said method comprising:
- providing a substrate;
- implanting ions into said substrate to form a resistor region therein, wherein an implanting energy of said ions is about 12 kev to 13 kev, a dosage of said ions is about 2×1015cm−2 to 4×1015cm−2, and said ions belong to III group elements;
- and
- forming a salicide layer on said substrate, wherein said salicide layer is not formed on said resistor region.
A method for forming a resistor to replace N-well resistor, said method comprising:
- providing a substrate, wherein said substrate is a polysilicon substrate;
- implanting ions into said substrate to form a non-salicide p+ polysilicon resistor therein, wherein an implanting energy of said ions is about 12 kev to 13 kev dosage of said ions is about 2×1015cm−2 to 4×1015cm−2 , and said ions belong to III group elements;
- and
- forming a salicide layer on said substrate, wherein said salicide layer is not formed on said non-salicide p+ polysilicon resistor.
Dependencies are inferred from the claim text.