Methods of forming switchable circuit devices
AssigneeMicron Technology, Inc.
InventorTerry L. Gilton
Life of this patent
Estimating the term…
Abstract
The invention includes a switchable circuit device. The device comprises a first conductive layer and a porous silicon matrix over the first conductive layer. A material is dispersed within pores of the porous silicon matrix, and the material has two stable states. A second conductive layer is formed over the porous silicon matrix. A current flow between the first and second conductive layers is influenced by which of the stable states the material is in.
Claims46
A method of forming a switchable circuit device, comprising forming a mass over a substrate;
- while the mass is over the substrate, forming pores within the mass to convert the mass to a porous matrix;
- providing an active molecular switchable memory material within the pores of the porous matrix;
- and
- forming an electrical connection to the porous matrix having the switchable memory material therein.
A method of forming a switchable circuit device, comprising
- providing a semiconductive material substrate;
- forming at least one n-type doped region within the substrate and beneath an uppermost surface of the substrate;
- forming at least one porous matrix over the at least one n-type doped region;
- providing an active molecular switchable memory material within the pores of the at least one porous matrix;
- and
- forming a conductive line over and in electrical contact with the at least one porous matrix having the switchable memory material therein.
A method of forming a switchable circuit device, comprising
- forming a mass over a substrate;
- while the mass is over the substrate, forming pores within the mass to convert the mass to a porous matrix;
- providing a mixture of active molecular switchable memory material within liquid carrier;
- providing the mixture within the pores of the porous matrix material;
- volatilizing the carrier from within the pores to leave the active molecular switchable memory material remaining within the pores;
- providing an active molecular switchable memory material within the pores of the porous matrix;
- and
- forming an electrical connection to the porous matrix having the switchable memory material therein.
A method of forming a switchable circuit device, comprising;
- providing a semiconductor substrate;
- forming a first conductive wiring layer supported by the substrate;
- forming porous silicon over the conductive wiring layer;
- providing an active molecular switchable memory material within pores of the porous silicon;
- and
- forming a second conductive wiring layer over the porous silicon and over the active molecular switchable memory material within the pores of the porous silicon.
A method of forming a semiconductor construction, comprising:
- providing a semiconductor substrate;
- forming an electrically insulative material over the semiconductor substrate;
- forming trenches extending into the electrically insulative material;
- forming a first conductive wiring layer within the trenches to partially fill the trenches;
- forming porous silicon over the first conductive wiring layer within the trenches;
- providing an active molecular switchable memory material within pores of the porous silicon;
- forming a planarized upper surface extending across an uppermost portion of the porous silicon and across an uppermost portion of the insulative material;
- and
- forming a second conductive wiring layer over the planarized upper surface.
Dependencies are inferred from the claim text.