Reticle cleaning without damaging pellicle
AssigneeMicron Technology, Inc.
InventorMatthew E. Williams
Life of this patent
Estimating the term…
Abstract
A reticle having a pellicle frame and pellicle membrane is cleaned without removing or damaging the pellicle membrane. A cover encases the pellicle membrane and pellicle frame, sealing the pellicle membrane from the external environment during a cleaning process. The cover fits around the periphery of the pellicle frame and covers the pellicle membrane. An edge of the cover in contact with the reticle forms a seal. The reticle is fastened to reticle supports on a spin chuck during the cleaning process. An anchor plate presses the cover to the reticle, maintaining the pellicle sealed from the external environment. The cover and reticle are sandwiched together between the anchor plate and spin chuck.
Claims20
A cleaning system for a reticle, comprising:
- a lid that encloses and seals a volume over a first surface of the reticle upon placement thereof in contact with the first surface, the volume being sized and configured to receive a pellicle membrane over a portion of the first surface and spaced apart therefrom;
- and
- at least one source that facilitates application of fluid to the reticle to at least partially effect cleaning of at least one exposed surface of the reticle.
A cleaning system for a reticle, comprising:
- a lid that encloses and seals a volume over a first surface of the reticle upon placement thereof in contact with the first surface, the volume being sized and configured to receive a pellicle membrane over a portion of the first surface and spaced apart therefrom;
- at least one source that facilitates application of fluid to the reticle to at least partially effect cleaning of at least one exposed surface of the reticle;
- and
- a support for the reticle, the support configured to rotate the reticle as the at least one source directs fluid onto the reticle.
Dependencies are inferred from the claim text.