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US 6,712,288 B2Granted
Method and apparatus for separating sample
AssigneeCanon Kabushiki Kaisha
InventorsKazutaka Yanagita, Kiyofumi Sakaguchi
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Abstract
This invention is to improve the reproducibility and yield in separating a bonded substrate stack. A bonded substrate stack having a porous layer inside is held by substrate holding portions 105 and 106, and a fluid is injected from a nozzle to the porous layer of the bonded substrate stack, thereby separating the bonded substrate stack at the porous layer. The variation in pressure of the fluid is suppressed within a predetermined range by a servo-driven pump.
Claims8
A separating apparatus for separating a sample by a fluid, comprising:
- a holding portion for holding a sample having a separation layer inside;
- a nozzle for injecting a fluid to the separation layer of the sample held by said holding portion;
- a fluid supply portion for supplying the fluid to said nozzle;
- and
- an operation mechanism for changing a position where the fluid is injected from said nozzle to the sample along with progress of the separation processing,
- wherein said fluid supply portion suppresses a variation in pressure of the fluid to be supplied to said nozzle within a predetermined range during separation processing so that the fluid is ejected from said nozzle at substantially constant pressure, and wherein said operation mechanism changes the position where the fluid is injected to the separation layer of the sample gradually or stepwise from a peripheral portion to a central portion of the separation layer along with progress of the separation processing.
3 more elements
Dependencies are inferred from the claim text.